Topographic Characteristics of Ion-etched Surface
نویسندگان
چکیده
منابع مشابه
Surface Reconstruction of Etched Contours
Previously, a computationally efficient and geometrically accurate etching simulation was developed to compute contours of constant depth at different time steps [1]. Experimental verification of this early work has been established [2]. However, contours are not amenable to the analysis and design of microsystems, since it is often necessary to determine object interaction and mechanics in whi...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1975
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.41.332